Functionally integrated coating structures

US11718905B2 · kind B2 · utility

Assignee

• TECHNETICS GROUP LLC · US

Inventors

• Nader M. Kalkhoran · Tewksbury, US
• Eric Tobin · North Andover, US
• Tim Egge · Charlotte, US
• Jason Burns · Brookfield, US
• Rick Oliver · Capistrano Beach, US
• Angus McFadden · Santa Clara, US
• Jason Wright · Sunnyvale, US

Key dates

• Filing date: May 30, 2018
• Grant date: Aug 8, 2023
• Expiry date: Mar 18, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/32715
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Techniques for depositing a functionally integrated coating structure on a substrate are provided. An example method according to the disclosure includes receiving the substrate into a process chamber of a multi-process ion beam assisted deposition system, disposing the substrate in a first zone including a first evaporator species and a first ion beam, wherein the first evaporator species is Aluminum Oxide (Al2O3), disposing the substrate in a second zone including a second evaporator species and a second ion beam, wherein the second evaporator species is Yttrium Oxide (Y2O3), and disposing the substrate in a third zone including a third evaporator species and a third ion beam, wherein the third evaporator species is Yttrium Fluoride (YF3).