Patent · US Active

Method and apparatus for determining a position of a ring within a process kit

US11721569B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Inventors

Andrew Myles · Sunnyvale, US
Andreas Schmid · Duisburg, DE
Phillip Criminale · Livermore, US
Steven E. Babayan · Los Altos, US

Key dates

Filing date	Jun 18, 2021
Grant date	Aug 8, 2023
Priority date	—
Expiry date	Sep 14, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68735
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.