Inventor · Los Altos, CA, US

Steven E. Babayan

26Patents
4h-index
43Co-inventors
63Inventor score

Filing activity: Nov 5, 2004 → May 30, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7329608B2 Method of processing a substrate Electricity 173 Expired
US11114286B2 In-situ optical chamber surface and process sensor Electricity 9 Active
US11393710B2 Wafer edge ring lifting solution Electricity 5 Active
US10607817B2 Thermal repeatability and in-situ showerhead temperature monitoring Electricity 4 Active
US10440777B2 Azimuthally tunable multi-zone electrostatic chuck Electricity 4 Active
US10964584B2 Process kit ring adaptor Electricity 4 Active
US9472435B2 Tunable temperature controlled substrate support assembly Electricity 2 Active
US11373893B2 Cryogenic electrostatic chuck Electricity 1 Active
US11508558B2 Thermal repeatability and in-situ showerhead temperature monitoring Electricity 1 Active
US11075105B2 In-situ apparatus for semiconductor process module Electricity 1 Active
US12094752B2 Wafer edge ring lifting solution Electricity 1 Active
US10409295B2 Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) Emerging Cross-Sectional Technologies 0 Active
US11437261B2 Cryogenic electrostatic chuck Electricity 0 Active
US12009244B2 Tunable temperature controlled substrate support assembly Electricity 0 Active
US12211734B2 Lift pin mechanism Electricity 0 Active
US10410900B2 Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic Electricity 0 Active
US11721569B2 Method and apparatus for determining a position of a ring within a process kit Electricity 0 Active
US11842917B2 Process kit ring adaptor Electricity 0 Active
US11735401B2 In-situ optical chamber surface and process sensor Electricity 0 Active
US10535544B2 Tunable temperature controlled substrate support assembly Electricity 0 Active
US12406865B2 Substrate carrier with array of independently controllable heater elements Electricity 0 Active
US12334385B2 Tunable temperature controlled substrate support assembly Electricity 0 Active
US11887879B2 In-situ apparatus for semiconductor process module Electricity 0 Active
US12165905B2 Process kit enclosure system Electricity 0 Active
US11622419B2 Azimuthally tunable multi-zone electrostatic chuck Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.