Apparatus and method for determining parameters of process operation
US11724354B2 · kind B2 · utility
0Cited by
12References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 5, 2016 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Apr 14, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Various examples of the present technology disclose a self-contained and programmable Processing Probe Apparatus (PPA) that can measure processing properties of a processing tool. The PPA comprises one or more sensors, an analog-to-digital converter and information (ADCI) processor, an electrical power source (EPS), and a digital signal communication device, all of which are attached to a flexible film. The flexible film can be mounted on a substrate that mimics a semiconductor workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.