Anthony Chen
19Patents
8h-index
29Co-inventors
72Inventor score
Filing activity: Dec 31, 1997 → Mar 6, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7138067B2 | Methods and apparatus for tuning a set of plasma processing steps | Electricity | 36 | Expired |
| US6074516A | High sputter, etch resistant window for plasma processing chambers | Electricity | 18 | Expired |
| US6777173B2 | H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip | Electricity | 12 | Expired |
| US6344151B1 | Gas purge protection of sensors and windows in a gas phase processing reactor | Emerging Cross-Sectional Technologies | 11 | Expired |
| US11535496B2 | Device for stabilizing a hoisted object | Performing Operations; Transporting | 9 | Active |
| US7097744B2 | Method and apparatus for controlling darkspace gap in a chamber | Electricity | 9 | Expired |
| US6711621B1 | System and method of implementing netware core protocol within a sockets model | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6071375A | Gas purge protection of sensors and windows in a gas phase processing reactor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US8313635B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 6 | Active |
| US7811409B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 4 | Active |
| US6770214B2 | Method of reducing aluminum fluoride deposits in plasma etch reactor | Electricity | 3 | Expired |
| US7578945B2 | Method and apparatus for tuning a set of plasma processing steps | Electricity | 2 | Active |
| US11620452B2 | Dynamic text message processing implementing endpoint communication channel selection | Electricity | 1 | Active |
| US11080652B2 | Method and system for supply chain management | Physics | 1 | Active |
| US8859432B2 | Bare aluminum baffles for resist stripping chambers | Electricity | 0 | Active |
| US12099337B1 | Control moment gyroscope hoist stabilization system, method, and apparatus | Physics | 0 | Active |
| US11724354B2 | Apparatus and method for determining parameters of process operation | Emerging Cross-Sectional Technologies | 0 | Active |
| US12333255B2 | Dynamic text message processing implementing endpoint communication channel selection | Electricity | 0 | Active |
| US12136277B2 | Collection, processing, and output of flight information method, system, and apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.