Inventor · Stanford, CA, US

Anthony Chen

19Patents
8h-index
29Co-inventors
72Inventor score

Filing activity: Dec 31, 1997 → Mar 6, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7138067B2 Methods and apparatus for tuning a set of plasma processing steps Electricity 36 Expired
US6074516A High sputter, etch resistant window for plasma processing chambers Electricity 18 Expired
US6777173B2 H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip Electricity 12 Expired
US6344151B1 Gas purge protection of sensors and windows in a gas phase processing reactor Emerging Cross-Sectional Technologies 11 Expired
US11535496B2 Device for stabilizing a hoisted object Performing Operations; Transporting 9 Active
US7097744B2 Method and apparatus for controlling darkspace gap in a chamber Electricity 9 Expired
US6711621B1 System and method of implementing netware core protocol within a sockets model Emerging Cross-Sectional Technologies 9 Expired
US6071375A Gas purge protection of sensors and windows in a gas phase processing reactor Emerging Cross-Sectional Technologies 8 Expired
US8313635B2 Bare aluminum baffles for resist stripping chambers Electricity 6 Active
US7811409B2 Bare aluminum baffles for resist stripping chambers Electricity 4 Active
US6770214B2 Method of reducing aluminum fluoride deposits in plasma etch reactor Electricity 3 Expired
US7578945B2 Method and apparatus for tuning a set of plasma processing steps Electricity 2 Active
US11620452B2 Dynamic text message processing implementing endpoint communication channel selection Electricity 1 Active
US11080652B2 Method and system for supply chain management Physics 1 Active
US8859432B2 Bare aluminum baffles for resist stripping chambers Electricity 0 Active
US12099337B1 Control moment gyroscope hoist stabilization system, method, and apparatus Physics 0 Active
US11724354B2 Apparatus and method for determining parameters of process operation Emerging Cross-Sectional Technologies 0 Active
US12333255B2 Dynamic text message processing implementing endpoint communication channel selection Electricity 0 Active
US12136277B2 Collection, processing, and output of flight information method, system, and apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.