Sample inspection apparatus employing a diffraction detector
US11726048B2 · kind B2 · utility
0Cited by
6References
8Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Sep 15, 2022 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Sep 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample inspection apparatus includes a source of electromagnetic radiation, a beam former for producing a plurality of coaxial and substantially conical shells of radiation, a detection surface and a set of conical shell slot collimators. Each conical shell has a different opening angle. The detection surface is arranged to receive diffracted radiation after incidence of one or more of the conical shells upon the sample to be inspected. The set of conical shell slot collimators is provided at or close to the detection surface which each stare at different annular regions of different corresponding conical shells.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.