Liquid metal MEMS switch
US11728111B2 · kind B2 · utility
0Cited by
2References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2018 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Nov 8, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2029/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency the droplet can spread allowing at least two conductors to be coupled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.