Overhead hoist transport system
US11735452B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 4, 2021 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Dec 25, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67379
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An overhead hoist transport system includes a vehicle, a wafer box and a controller. The vehicle includes a combiner. The combiner includes at least one magnetic module. The magnetic module is fixed to a base plate. The magnetic module is downwardly protruded. The wafer box includes a header. The header includes a combining member configured to correspond to the magnetic module. The controller is configured to generate a control signal for controlling attachment and detachment operations between the combiner and the wafer box. The magnetic module includes a frame, a first permanent magnet, a second permanent magnet and a magnetic switch. The frame has an annular cross-sectional shape. The first permanent magnet is fixed to the frame. The second permanent magnet is rotatably arranged in the frame. The magnetic switch is configured to rotate the second magnet in response to the control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.