Electrostatic chuck
US11735459B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2022 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Sep 7, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67063
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to an electrostatic chuck. The electrostatic chuck according to the present disclosure may include a base substrate; an electrostatic chuck plate fixed on the base substrate, the electrostatic chuck plate having an electrode therein; and an electrode part disposed in a hole in the base substrate to supply power to the electrode, wherein the electrode part may include a housing inserted into the hole in the base substrate, an electrode rod passing through the inner wall of the housing such that one end thereof is in contact with the electrode; and an elastic support body configured to support the electrode rod at multiple points on the inner wall of the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.