MiCo Ceramics Ltd.
22Patents
21Active
22Granted
58Portfolio score
Filing activity: Sep 30, 2016 → Dec 11, 2024
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12154799B2 | Susceptor for high-temperature use having shaft with low thermal conductivity | Electricity | 1 | Active |
| US11508586B2 | Aluminum nitride sintered body and member for semiconductor manufacuting apparatus comprising same | Chemistry; Metallurgy | 1 | Active |
| US12040209B2 | Electrostatic chuck heater and manufacturing method therefor | Electricity | 1 | Active |
| US12237204B1 | Ceramic susceptor and method of manufacturing same | Performing Operations; Transporting | 0 | Active |
| US11581211B2 | Electrostatic chuck having a cooling structure | Electricity | 0 | Active |
| US12406864B2 | Susceptor | Electricity | 0 | Active |
| US11735459B2 | Electrostatic chuck | Electricity | 0 | Active |
| US12176238B1 | Cryogenic susceptor and electric connector assembly used therein | Electricity | 0 | Active |
| US12089296B2 | Ceramic heater | Electricity | 0 | Active |
| US11133202B2 | Substrate heating apparatus with enhanced temperature uniformity characteristic | Electricity | 0 | Active |
| US12406875B2 | Susceptor including purge gas flow passage | Electricity | 0 | Active |
| US12280566B2 | Ceramic susceptor | Chemistry; Metallurgy | 0 | Active |
| US12283513B2 | Ceramic susceptor | Electricity | 0 | Active |
| US11309206B2 | Electro static chuck | Electricity | 0 | Active |
| US11908667B2 | Ceramic susceptor | General | 0 | Revoked |
| US11395377B2 | Ceramic heater having improved durability | Electricity | 0 | Active |
| US11908725B2 | Electrostatic chuck heater and manufacturing method therefor | Electricity | 0 | Active |
| US12351525B2 | Method for manufacturing ceramic heater | Chemistry; Metallurgy | 0 | Active |
| US11937345B2 | Ceramic heater | Electricity | 0 | Active |
| US11955320B2 | Ceramic susceptor | Electricity | 0 | Active |
| US11963270B2 | Ceramic susceptor | Electricity | 0 | Active |
| US11990322B2 | Ceramic susceptor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.