Device and method for measuring the beam angle of a light beam guided by a beam guiding optical unit
US11737199B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2021 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Feb 3, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70033
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus includes a light intensity sensor arrangement, a focusing unit for focusing the light beam at a specified location on the light intensity sensor arrangement, and an adjustment unit which adjusts a relative position of the intensity centroid of the light beam in relation to a specified location on the light intensity sensor arrangement when there is a change in the beam angle present upon entry in the apparatus. The adjustment unit is configured to keep the relative position of the intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement constant up to a specified maximum deviation. The maximum deviation corresponds to half the mean beam diameter upon incidence on the light intensity sensor arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.