Fast and accurate mueller matrix infrared spectroscopic ellipsometer
US11740176B2 · kind B2 · utility
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27Claims
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Key dates
| Filing date | Jan 18, 2022 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Apr 7, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.