Inventor · Lincoln, NE, US

Martin M. Liphardt

121Patents
11h-index
26Co-inventors
80Inventor score

Filing activity: May 30, 2000 → Dec 8, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7633625B1 Spectroscopic ellipsometer and polarimeter systems Physics 108 Active
US7616319B1 Spectroscopic ellipsometer and polarimeter systems Physics 106 Active
US7907280B2 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation Physics 93 Active
US6982792B1 Spectrophotometer, ellipsometer, polarimeter and the like systems Physics 28 Expired
US6456376B1 Rotating compensator ellipsometer system with spatial filter Physics 22 Expired
US6859278B1 Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems Physics 18 Expired
US7274450B1 Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems Physics 16 Expired
US7158231B1 Spectroscopic ellipsometer and polarimeter systems Physics 16 Expired
US6804004B1 Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry Physics 15 Expired
US7277171B1 Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Physics 12 Expired
US7492455B1 Discrete polarization state spectroscopic ellipsometer system and method of use Physics 12 Active
US7336361B1 Spectroscopic ellipsometer and polarimeter systems Physics 11 Active
US7505134B1 Automated ellipsometer and the like systems Physics 11 Active
US7075650B1 Discrete polarization state spectroscopic ellipsometer system and method of use Physics 11 Expired
US8169611B2 Terahertz-infrared ellipsometer system, and method of use Physics 9 Active
US7385697B2 Sample analysis methodology utilizing electromagnetic radiation Physics 9 Expired
US7468794B1 Rotating compensator ellipsometer system with spatial filter equivalent Physics 8 Active
US7084978B1 Sample orientation system and method Physics 8 Expired
US7245376B2 Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter Physics 8 Expired
US7746471B1 Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems Physics 8 Active
US7136162B1 Alignment of ellipsometer beam to sample surface Physics 7 Expired
US7136172B1 System and method for setting and compensating errors in AOI and POI of a beam of EM radiation Physics 7 Expired
US8749785B2 Operation of an electromagnetic radiation focusing element Physics 7 Active
US7345762B1 Control of beam spot size in ellipsometer and the like systems Physics 7 Active
US7304737B1 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence Physics 7 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.