Martin M. Liphardt
121Patents
11h-index
26Co-inventors
80Inventor score
Filing activity: May 30, 2000 → Dec 8, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7633625B1 | Spectroscopic ellipsometer and polarimeter systems | Physics | 108 | Active |
| US7616319B1 | Spectroscopic ellipsometer and polarimeter systems | Physics | 106 | Active |
| US7907280B2 | Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation | Physics | 93 | Active |
| US6982792B1 | Spectrophotometer, ellipsometer, polarimeter and the like systems | Physics | 28 | Expired |
| US6456376B1 | Rotating compensator ellipsometer system with spatial filter | Physics | 22 | Expired |
| US6859278B1 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Physics | 18 | Expired |
| US7274450B1 | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems | Physics | 16 | Expired |
| US7158231B1 | Spectroscopic ellipsometer and polarimeter systems | Physics | 16 | Expired |
| US6804004B1 | Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry | Physics | 15 | Expired |
| US7277171B1 | Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems | Physics | 12 | Expired |
| US7492455B1 | Discrete polarization state spectroscopic ellipsometer system and method of use | Physics | 12 | Active |
| US7336361B1 | Spectroscopic ellipsometer and polarimeter systems | Physics | 11 | Active |
| US7505134B1 | Automated ellipsometer and the like systems | Physics | 11 | Active |
| US7075650B1 | Discrete polarization state spectroscopic ellipsometer system and method of use | Physics | 11 | Expired |
| US8169611B2 | Terahertz-infrared ellipsometer system, and method of use | Physics | 9 | Active |
| US7385697B2 | Sample analysis methodology utilizing electromagnetic radiation | Physics | 9 | Expired |
| US7468794B1 | Rotating compensator ellipsometer system with spatial filter equivalent | Physics | 8 | Active |
| US7084978B1 | Sample orientation system and method | Physics | 8 | Expired |
| US7245376B2 | Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter | Physics | 8 | Expired |
| US7746471B1 | Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems | Physics | 8 | Active |
| US7136162B1 | Alignment of ellipsometer beam to sample surface | Physics | 7 | Expired |
| US7136172B1 | System and method for setting and compensating errors in AOI and POI of a beam of EM radiation | Physics | 7 | Expired |
| US8749785B2 | Operation of an electromagnetic radiation focusing element | Physics | 7 | Active |
| US7345762B1 | Control of beam spot size in ellipsometer and the like systems | Physics | 7 | Active |
| US7304737B1 | Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence | Physics | 7 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.