Photonic device
US11740409B2 · kind B2 · utility
0Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2022 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | May 9, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/34
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photonic device includes an optical coupler, a waveguide structure, a metal-dielectric stack, and a protection layer. The optical coupler is over a semiconductor substrate. The waveguide structure is over the semiconductor substrate and laterally connected to the optical coupler. A top of the waveguide structure is lower than a top of the optical coupler. The metal-dielectric stack is over the optical coupler and the waveguide structure. The metal-dielectric stack has a hole above the optical coupler. The protection layer lines the hole of the metal-dielectric stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.