Patent · US Active

Sealing device, component and lithography apparatus

US11740562B2 · kind B2 · utility

0Cited by

1References

22Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dieter Bader · Berndorf, AT
Alexander Ostendorf · Langenau, DE
Ole Fluegge · Heubach, DE

Key dates

Filing date	Sep 30, 2021
Grant date	Aug 29, 2023
Priority date	—
Expiry date	Oct 22, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/0983
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.