Inventor · Heubach, DE

Ole Fluegge

5Patents
3h-index
18Co-inventors
50Inventor score

Filing activity: Jun 20, 2008 → Sep 30, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8325322B2 Optical correction device Physics 11 Active
US8508854B2 Optical element and method Physics 6 Active
US8891172B2 Optical element and method Physics 3 Active
US7768721B2 Optical assembly, projection exposure apparatus and projection objective Physics 2 Active
US11740562B2 Sealing device, component and lithography apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.