Method for imaging a sample
US11742171B2 · kind B2 · utility
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1References
15Claims
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Assignee
Inventor
Key dates
| Filing date | Jul 2, 2020 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Jul 11, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/3307
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for imaging a sample by means of an X-ray detector is disclosed, including providing an electron beam interacting with a target to generate X-ray radiation emitted from an X-ray spot on the target, moving the sample relative to the target, deflecting the electron beam such that the X-ray spot is moved over the target simultaneously and in accordance with the movement of the sample, and detecting X-ray radiation emitted from the X-ray spot and interacting with the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.