Deep ultraviolet light source
US11747008B2 · kind B2 · utility
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18Claims
0Family size
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Key dates
| Filing date | Mar 10, 2021 |
| Grant date | Sep 5, 2023 |
| Priority date | — |
| Expiry date | Jun 9, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/856
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A DUV light source module includes a print circuit board, an array of DUV light-emitting diodes (LEDs), a plurality of DUV LED drivers for driving the DUV light-emitting diodes, and a pair of electrical connectors for connecting the DUV LED drivers hence the DUV light-emitting diodes to a power source, and A DUV light source device includes the DUV light source module, a reflector, a heat sink, a heat pipe, a radiator and a fan.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.