Concentration estimation method

US11761920B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Abygael Viey · Grenoble, FR
• Marie-Anne Jaud · Grenoble, FR
• William Vandendaele · Grenoble, FR

Key dates

• Filing date: Nov 10, 2020
• Grant date: Sep 19, 2023
• Expiry date: Sep 6, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2648
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of estimating a nitrogen site carbon concentration, in a first epitaxial layer made of carbon-doped gallium nitride of an electronic component, including steps of: estimating an electric capacitance of a stack interposed between the first layer and a first electrode of the component; heating the component; measuring an offset of a threshold voltage of the component; and deducing therefrom a nitrogen site carbon surface concentration in the first layer.