Patent · US Active

Method and apparatus for identifying sample position in atomic force microscope

US11761981B2 · kind B2 · utility

0Cited by
2References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 24, 2021
Grant dateSep 19, 2023
Priority date
Expiry dateJan 26, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG05B13/027
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus and a method for identifying a sample position in an atomic force microscope according to an exemplary embodiment of the present disclosure are provided. The method for identifying a sample position in an atomic force microscope includes receiving a vision image including a subject sample through a vision unit; determining a subject sample region in the vision image using a prediction model which is configured to output the subject sample region by receiving the vision image as an input; and determining a position of the subject sample based on the subject sample region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.