Patent assignee · KR · COMPANY

PARK SYSTEMS CORP.

17Patents
17Active
17Granted
62Portfolio score

Filing activity: Nov 1, 2006 → Jan 30, 2023 · 6 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8099793B2 Scanning probe microscope with automatic probe replacement function Physics 10 Active
US7709791B2 Scanning probe microscope with automatic probe replacement function Physics 5 Active
US7644447B2 Scanning probe microscope capable of measuring samples having overhang structure Emerging Cross-Sectional Technologies 3 Active
US7514679B2 Scanning probe microscope for measuring angle and method of measuring a sample using the same Physics 1 Active
US12399195B2 Method for measuring, by measurement device, characteristics of surface of object to be measured, atomic force microscope for performing same method, and computer program stored in storage medium to perform same method Physics 0 Active
US10133052B2 Image acquiring method and image acquiring apparatus using the same Physics 0 Active
US8209766B2 Scanning probe microscope capable of measuring samples having overhang structure Emerging Cross-Sectional Technologies 0 Active
US11959852B2 Method for determining properties of a sample by ellipsometry Physics 0 Active
US9645169B2 Measurement apparatus and method with adaptive scan rate Physics 0 Active
US9645168B2 Head limiting movement range of laser spot and atomic force microscope having the same Performing Operations; Transporting 0 Active
US11619649B1 Atomic force microscope equipped with optical measurement device and method of acquiring information on surface of measurement target using the same Physics 0 Active
US12038455B2 Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source Physics 0 Active
US11175308B2 Chip carrier exchanging device and atomic force microscopy apparatus having same Physics 0 Active
US11761981B2 Method and apparatus for identifying sample position in atomic force microscope Physics 0 Active
US11598788B2 Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source Physics 0 Active
US9081272B2 Leveling apparatus and atomic force microscope including the same Physics 0 Active
US8402560B2 Scanning probe microscope with drift compensation Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.