Patent · US Active

Use of buffer members during growth of single crystal silicon ingots

US11767610B2 · kind B2 · utility

3Cited by
1References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 16, 2021
Grant dateSep 26, 2023
Priority date
Expiry dateDec 16, 2041

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B29/06
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods for producing single crystal silicon ingots by Continuous Czochralski (CCz) are disclosed. A batch of buffer members (e.g., quartz cullets) is added to an outer melt zone of the crucible assembly before the main body of the ingot is grown. In some embodiments, the ratio of the mass M of the batch of buffer members added to the melt to the time between adding the batch of buffer members to the melt and when the ingot main body begins to grow is controlled such that the ratio of M/T is greater than a threshold M/T.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.