Patent · US Active

Method for calibrating a measuring apparatus

US11774237B2 · kind B2 · utility

2Cited by

3References

12Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jochen Hetzler · Aalen, DE
Stefan Schulte · Marburg, DE
Matthias Dreher · Oberkochen, DE

Key dates

Filing date	Feb 21, 2022
Grant date	Oct 3, 2023
Priority date	—
Expiry date	Feb 21, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG01M11/005
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for calibrating a measuring device (10) for interferometrically determining a shape of an optical surface (12) of an object under test (14). The measuring device includes a module plane (32) for arranging a diffractive optical test module (30) which is configured to generate a test wave (34) that is directed at the optical surface and that has a wavefront at least approximately adapted to a target shape (60) of the optical surface. The method includes: arranging a diffractive optical calibration module (44) in the module plane for generating a calibration wave (80), acquiring a calibration interferogram (88) generated using the calibration wave in a detector plane (43) of the measuring device, and determining a position assignment distribution (46) of points (52) in the module plane to corresponding points (54) in the detector plane from the acquired calibration interferogram.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.