Substance analyzer and substance analysis method
US11776800B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2019 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Nov 13, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/028
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substance analyzer that includes, to enhance selectivity of substance analysis, the following: a heater that heats a medium for collecting a chemical substance adhering to a surface of an inspection object; a mass spectrometer that performs tandem mass spectrometry of vapor derived from the chemical substance heated and vaporized by the heater from the medium; and a control device that causes the mass spectrometer to perform, based on a temperature of the medium in the heater, tandem mass spectrometry for the chemical substance that is vaporized at the temperature of the medium using the vapor sent from the heater to the mass spectrometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.