Patent · US Active

Chamber for degassing substrates

US11776825B2 · kind B2 · utility

0Cited by

15References

33Claims

0Family size

Assignee

EVATEC AG · CH

Inventors

Rogier Lodder · Bad Ragaz, CH
Martin Schäfer · Arnstadt, DE
Jurgen Weichart · Balzers, LI

Key dates

Filing date	Mar 8, 2016
Grant date	Oct 3, 2023
Priority date	—
Expiry date	Aug 28, 2036

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF27D2009/007
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A heater and/or cooler chamber includes a heat storage block or chunk. In the block a multitude of parallel, stacked slit pockets are each dimensioned to accommodate a single plate shaped workpiece. Workpiece handling openings of the slit pockets are freed and respectively covered by a door arrangement. The slit pockets are tailored to snugly surround the plate shaped workpieces therein so as to establish an efficient heat transfer between the heat storage block or chunk and the workpieces to be cooled or heated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.