Patent · US Active

Via array design for multi-layer redistribution circuit structure

US11776899B2 · kind B2 · utility

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19Claims
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Assignee

Inventors

Key dates

Filing dateFeb 18, 2021
Grant dateOct 3, 2023
Priority date
Expiry dateOct 24, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K2201/0979
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An interconnect structure for a redistribution layer includes an intermediate via land pad; a cluster of upper conductive vias abutting the intermediate via land pad and electrically coupling the intermediate via land pad to an upper via land pad; and an array of lower conductive vias electrically coupling the intermediate via land pad with a lower circuit pad. The array of lower conductive vias is arranged within a horseshoe-shaped via array region extending along a perimeter of the intermediate via land pad. The array of lower conductive vias arranged within the horseshoe-shaped via array region does not overlap with the cluster of upper conductive vias.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.