Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern
US11780946B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Oct 10, 2023 |
| Priority date | — |
| Expiry date | Jan 31, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alternating copolymer including a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) represented by general formula (a0-2) in which Rp01 represents a hydrogen atom or the like; Vp01 represents a single bond or a divalent linking group; Rp02 and Rp03 each independently represents a hydrocarbon group which may have a substituent, or Rp02 and Rp03 are mutually bonded to form a ring; Rp04 represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; Rp05 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a cyano group or a hydroxy group; Rp06 represents a linear or branched aliphatic hydrocarbon group; and m represents an integer of 0 to 4
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.