Nobuhiro MICHIBAYASHI
4Patents
1h-index
11Co-inventors
34Inventor score
Filing activity: May 23, 2019 → Jan 19, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11256169B2 | Resist composition, and method of forming resist pattern | Physics | 4 | Active |
| US11762288B2 | Resist composition, method of forming resist pattern, and acid diffusion-controlling agent | Physics | 0 | Active |
| US11693316B2 | Resist composition and method of forming resist pattern | Physics | 0 | Active |
| US11780946B2 | Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.