Patent · US Active

Systems and methods for plate-up detection

US11781238B2 · kind B2 · utility

0Cited by

2References

15Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Matthew Heller · Raleigh, US
David Bricker · Corte Madera, US

Key dates

Filing date	Apr 27, 2020
Grant date	Oct 10, 2023
Priority date	—
Expiry date	Jun 14, 2041

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC25D17/005
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.