Mask glue removing apparatus, system and method
US11786942B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2020 |
| Grant date | Oct 17, 2023 |
| Priority date | — |
| Expiry date | Nov 2, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2220/01
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A mask glue removing apparatus includes a first plate including a plurality of nozzles to be adjusted at independent dispensing angles of each other and a head in which the plurality of nozzles are installed and configured to move the head close to a position corresponding to a region of a mask in which glue is present, adjust the dispensing angles of the plurality of nozzles to face the region in which the glue is present, and dispense a chemical liquid, rinse, or air through the plurality of nozzles to remove the glue, and a second plate on which the mask is placed and configured to adjust a position of a main body according to a removal process for the glue.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.