Gas delivery system with electrical backplane
US11789472B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2020 |
| Grant date | Oct 17, 2023 |
| Priority date | — |
| Expiry date | Feb 19, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A gas delivery system is provided comprising an electrical backplane, a system controller operatively coupled to the electrical backplane, and a plurality of mass flow controllers. Each mass flow controller includes respective mass flow control circuitry operatively coupled to the electrical backplane. The system controller and each mass flow control circuitry are physically mounted on the electrical backplane. The gas delivery system further comprises a pump/purge system to help eliminate pressure build up in the system and provide a quick stop to a flow process in the system. Accordingly, a row associated with a flow process may be evaluated so that a mass flow controller may be swapped out as needed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.