AFM imaging with metrology-preserving real time denoising
US11796565B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Apr 9, 2021 |
| Grant date | Oct 24, 2023 |
| Priority date | — |
| Expiry date | Apr 20, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10056
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method of operating an atomic force microscope (AFM), using a denoising algorithm, real-time, during AFM data acquisition. Total Variation and Non-Local Means denoising are preferred. Real time images with minimized sensor noise needing no post-image acquisition processing to account for noise as described herein results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.