Method and apparatus for solvent recycling
US11798800B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
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Inventors
Key dates
| Filing date | Jun 25, 2021 |
| Grant date | Oct 24, 2023 |
| Priority date | — |
| Expiry date | Jun 25, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6708
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A solvent recycle system minimizes chemical consumption used in various semiconductor processes. The solvent is recycled from a nozzle bath via the addition of buffer tank to connect the bath and circulation pumps. Improvements to the bath design further maintain solvent cleanness by preventing intrusion of particles and overflow conditions in the bath.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.