Workpiece supporting apparatus and workpiece supporting method
US11804398B2 · kind B2 · utility
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1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2021 |
| Grant date | Oct 31, 2023 |
| Priority date | — |
| Expiry date | Aug 18, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B1/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A workpiece supporting apparatus capable of preventing a surface of a workpiece from drying out while maintaining a suction force when supporting the workpiece with a Bernoulli chuck is disclosed. The workpiece supporting apparatus includes a Bernoulli chuck configured to generate a suction force by emitting a gas; and a liquid ejection member surrounding the Bernoulli chuck and configured to discharge a liquid around the Bernoulli chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.