Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
US11808353B2 · kind B2 · utility
0Cited by
4References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 13, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Dec 2, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49872
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal insertion tools may be used to facilitate installation of the seals to permit efficient assembly of fluid flow components into apparatus for controlling flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.