Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
US11810749B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Feb 24, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1504
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a charged particle beam system comprising a deflection subsystem configured to deflect a charged particle beam in a deflection direction based on a sum of analog signals generated by separate digital to analog conversion of a first digital signal and a second digital signal. The present invention further relates to a method of configuring the charged particle beam system so that each of a plurality of regions of interest can be scanned by varying only the first digital signal while the second digital signal is held constant at a value associated with the respective region of interest. The present invention further relates to a method of recording a plurality of images of the regions of interest at the premise of reduced interference due to charge accumulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.