Patent · US Active

Flow control system, method, and apparatus

US11815920B2 · kind B2 · utility

0Cited by
216References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 7, 2021
Grant dateNov 14, 2023
Priority date—
Expiry dateNov 24, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.