Depositive shielding for fiducial protection from redeposition
US11817395B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Sep 29, 2020 |
| Grant date | Nov 14, 2023 |
| Priority date | — |
| Expiry date | Sep 29, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54426
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Redeposition of substrate material on a fiducial resulting from charged particle beam (CPB) or laser beam milling of a substrate can be reduced with a shield formed on the substrate surface. The shield typically has a suitable height that can be selected based on proximity of an area to be milled to the fiducial. The shield can be formed with the milling beam using beam-assisted chemical vapor deposition (CVD). The same or different beams can be used for milling and beam-assisted CVD.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.