Patent · US Active

Conductive interconnects suitable for utilization in integrated assemblies, and methods of forming conductive interconnects

US11818968B2 · kind B2 · utility

0Cited by
8References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 24, 2021
Grant dateNov 14, 2023
Priority date
Expiry dateDec 3, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N70/231
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

Some embodiments include an integrated assembly having an insulative mass over a conductive base structure. A conductive interconnect extends through the insulative mass to an upper surface of the conductive base structure. The conductive interconnect includes a conductive liner extending around an outer lateral periphery of the interconnect. The conductive liner includes nitrogen in combination with a first metal. A container-shaped conductive structure is laterally surrounded by the conductive liner. The container-shaped conductive structure includes a second metal. A conductive plug is within the container-shaped conductive structure. Some embodiments include methods of forming conductive interconnects within integrated assemblies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.