Fast and accurate Mueller matrix infrared ellipsometer
US11821833B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Feb 5, 2022 |
| Grant date | Nov 21, 2023 |
| Priority date | — |
| Expiry date | Jul 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.