Substrate transport apparatus
US11830749B2 · kind B2 · utility
0Cited by
16References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2023 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Feb 7, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.