Vibration component measurement device, Kelvin probe force microscope, and vibration component measurement method
US11835548B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 25, 2021 |
| Grant date | Dec 5, 2023 |
| Priority date | — |
| Expiry date | Mar 25, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to increase the order of a frequency of an AC signal to be applied between a vibration section and a sample to an order at substantially the same level as the order of a vibration frequency of the vibration section in measuring a vibration component of the vibration control section, a vibration component measuring device (2) includes: a vibration section (4); a first AC signal generator (20) configured to generate a first AC signal; a second AC signal generator (44) configured to generate a second AC signal having a frequency which is (a) more than one time and less than two times or (b) more than two times and less than three times as high as a frequency of the first AC signal; a signal applying section (14, 56) configured to apply the second AC signal between the vibration section and a sample (X); a vibration control section (10) configured to cause the vibration section to vibrate; and a measuring section (16, 18, 20, 22, 42, 44, 50) configured to measure a varying component of vibration of the vibration section, the varying component being varied by an interaction between the vibration section and the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.