Electronics tester
US11835575B2 · kind B2 · utility
7Cited by
85References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2021 |
| Grant date | Dec 5, 2023 |
| Priority date | — |
| Expiry date | Nov 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tester apparatus is described. Various components contribute to the functionality of the tester apparatus to facilitate movement of a wafer pack holding a vacuum without human oversight. These functionalities include a latch system to keep the wafer pack intact and a pressure sensing system to detect and relay a pressure in the wafer pack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.