Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors

US11835710B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• David Brunner · Dobersberg, AT
• Stephan Gerhard Albert · Munich, DE
• Franz Michael Darrer · Graz, AT
• Georg Schitter · Wien, AT
• Richard SCHROEDTER · Doren, AT
• Han Woong Yoo · Wien, AT

Key dates

• Filing date: Dec 15, 2020
• Grant date: Dec 5, 2023
• Expiry date: Mar 1, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01S17/10
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A scanning system includes a microelectromechanical system (MEMS) scanning structure configured with a desired rotational mode of movement based on a driving signal; a plurality of comb-drives configured to drive the MEMS scanning structure according to the desired rotational mode of movement based on the driving signal, each comb-drive including a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure; a driver configured to generate the at least one driving signal; a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive; and a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.