Patent · US Active

Setting position of a particle beam device component

US11837434B2 · kind B2 · utility

0Cited by

2References

18Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Andreas Schmaunz · Oberkochen, DE
Gero Walter · Lauchheim, DE
Bernd Stenke · Illertissen, DE

Key dates

Filing date	Sep 30, 2019
Grant date	Dec 5, 2023
Priority date	—
Expiry date	Aug 7, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24585
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for setting position of a component of a particle beam apparatus may be performed, for example, by the particle beam apparatus. The component may be embodied as a gas feed device, as a particle detector and/or as a beam detector. The method may include: aligning the component with a coincidence point of a particle beam of the particle beam apparatus, determining a rotation angle of a rotation of an object carrier about a rotation axis, loading a position of the component associated with the rotation angle from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component, and moving the component into the position loaded from the database by means of the drive unit, wherein the component arranged in the loaded position is at a pre-definable distance from the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.