Specimen machining device and information provision method
US11837437B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2022 |
| Grant date | Dec 5, 2023 |
| Priority date | — |
| Expiry date | Aug 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30472
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.