O-ring seals for fluid sensing

US11837513B2 · kind B2 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Sebastian Meier · Munich, DE
• Bernhard Lange · Gerolzhofen, DE

Key dates

• Filing date: Jul 17, 2020
• Grant date: Dec 5, 2023
• Expiry date: Jul 7, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/1815
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In some examples, a device comprises a substrate including a notch formed in a surface of the substrate and a semiconductor die positioned in the notch and including an electrochemical sensor on an active surface of the semiconductor die. The device also comprises a chemically inert member abutting the surface of the substrate and including an orifice in vertical alignment with the electrochemical sensor as a result of the semiconductor die being positioned in the notch. The device also comprises a compressed o-ring seal positioned between the chemically inert member and the active surface of the semiconductor die, the compressed o-ring seal circumscribing the electrochemical sensor.