Laminar flow restrictor and seal for same
US11841036B2 · kind B2 · utility
1Cited by
37References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2022 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Mar 31, 2042 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K47/08
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.