Wafer jig, robot system, communication method, and robot teaching method
US11845179B2 · kind B2 · utility
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11References
9Claims
0Family size
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Key dates
| Filing date | Dec 22, 2020 |
| Grant date | Dec 19, 2023 |
| Priority date | — |
| Expiry date | Apr 22, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68714
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A wafer jig according to one or more embodiments may be used for a robot having a hand and a state detector. The hand can transport a wafer. The state detector detects a state of a member holding the wafer at the hand or a state of a negative pressure adsorbing the wafer at the hand. The wafer jig includes an information output part. The information output part outputs information to a hand side via the state detector by changing a detection result of the state detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.