Patent · US Active

Measurement method and apparatus

US11846497B2 · kind B2 · utility

1Cited by
15References
20Claims
0Family size

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Inventors

Key dates

Filing dateJun 10, 2019
Grant dateDec 19, 2023
Priority date—
Expiry dateDec 30, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P1/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Method for measuring an object using a scanning probe carried by a machine tool having a probe holder for the scanning probe and a carrier for the object. The method includes (i) using the machine tool to move the probe holder relative to the carrier along a pre-programmed scan path, (ii) measuring acceleration whilst the pre-programmed scan path is traversed, (iii) collecting probe data whilst the pre-programmed scan path is traversed, and (iv) using the acceleration measured to identify at least one acceleration zone of the pre-programmed scan path and thereby determine one or more positions along the scan path at which the probe data of step (iii) were collected.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.